Проекционная оптическая фотолитография в производстве полупроводниковых приборов и интегральных схем: (Գրառման հմ. 267278)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01163nam a2200205 a 4500 |
| 001 - CONTROL NUMBER | |
| control field | 000324943 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20221203180003.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 990619s1970 ||| r 000 0 rus d |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | AM, ACSTI |
| 041 0# - LANGUAGE CODE | |
| Language code of text/sound track or separate title | rus |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Глазштейн, Л.Я. |
| 245 10 - TITLE STATEMENT | |
| Title | Проекционная оптическая фотолитография в производстве полупроводниковых приборов и интегральных схем: |
| Remainder of title | Обзоры по электронной технике / |
| Statement of responsibility, etc. | Л.Я. Глазштейн, Ф.П. Пресс; Ред. А.В. Панюшкин; Министерство электронной промышленности СССР. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Москва : |
| Name of publisher, distributor, etc. | Институт "Электроника", |
| Date of publication, distribution, etc. | 1970. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 106 с. |
| Other physical details | ил. |
| 440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE | |
| Title | Полупроводниковые приборы |
| Number of part/section of a work | вып. 2(167) |
| 650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Проекционная оптическая фотолитография |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Пресс, Ф.П. |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Министерство электронной промышленности СССР |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Панюшкин, А.В. |
| Relator code | edt |
| Relator term | Ред. |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Date acquired | Cost, normal purchase price | Shelving control number | Full call number | Barcode | Date last seen | Price effective from | Koha item type | Public note |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Գրքային հավաքածու | Scientific Technical Library | Scientific Technical Library | 06/05/2017 | 463.00 | 127 | 621.38 Г 525 | 50-22447 | 06/05/2017 | 06/05/2017 | Book | Three Hour Loan |