000 00658nam a2200205 a 4500
001 000885414
003 AM-YeNLA
005 20230117140356.0
008 120418s1980 r 000 0 eng d
020 _a0-444-85351-0
041 0 _aeng
245 0 0 _aFine Line Lithography /
_cEdt. by R. Newman.
260 _aAmsterdam ;
_aNew York ;
_aOxford :
_bNorth-Holland Publishing Company,
_c1980.
300 _avol. :
_bfig., tables.
504 _aIncludes Bibliographical References and Index.
505 0 _gvol. 1 ( 1980, 481 p.)
_iMaterials Processing - Theory and Practices.
650 1 4 _aLithography
700 1 _aNewman, Roger.
_4edt
942 _2udc
_cBK
999 _c788284
_d788284