000 00549nam a2200181 a 4500
001 000885406
005 20170508005714.0
008 120418s1975 r 000 0 eng d
020 _a0-07-016230-1
041 0 _aeng
100 1 _aDeForest, William S.
245 1 0 _aPhotoresist :
_bMaterials and Processes /
_cW.S. DeForest.
260 _aNew York :
_bMcGraw-Hill Book Company,
_c1975.
300 _a269 p. :
_bfig., tables.
504 _aIncludes Bibliographical References and Index.
650 1 4 _aIntegrated Circuits
650 1 4 _aElectronics
999 _c788278
_d788278