000			01178cam a22002774a 4500
001			000459177
005			20170506193542.0
008			051021s2002 ||||||||||||||||||||eng|d
020			_a0125129084 (set : acid-free paper)
020			_a0125129092 (v. 1 : acid-free paper)
020			_a0125129106 (v. 2 : acid-free paper)
020			_a0125129114 (v. 3 : acid-free paper)
020			_a0125129122 (v. 4 : acid-free paper)
020			_a0125129130 (v. 5 : acid-free paper)
040			_aDLC _cDLC _dDLC
041	0		_aeng
042			_apcc
082	0	0	_a621.3815/2 _221
245	0	0	_aHandbook of thin film materials / _cedited by Hari Singh Nalwa.
260			_aSan Diego : _bAcademic Press, _cc2002.
300			_a5 v. : _bill. ; _c29 cm.
504			_aIncludes bibliographical references and indexes.
505	0		_av. 1. Deposition and processing of thin films -- v. 2. Characterization and spectroscopy of thin films -- v. 3. Ferroelectric and dielectric thin films -- v. 4. Semiconductor and superconductor thin films -- v. 5. Nanomaterials and magnetic thin films.
650		0	_aThin films _vHandbooks, manuals, etc.
700	1		_aNalwa, Hari Singh, _4edt _d1954-
999			_c393246 _d393246