Introduction to Microlithography :  Theory, Materials, and Processing / 
Edt. by L.F. Thompson, C.G. Willson & M.J. Bowden. 
 - Washington :  American Chemical Society,  1983. 
 - vol. :  fig., tables. 
 - ACS Symposium Series .
<br/><br/>Includes Bibliography and Index. 
<br/><br/> vol. 219 ( 1983, 363 p.) 
<br/><br/><label>ISBN: </label>0-8412-0775-5 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography