Ruska, Walter E.W. <br/><br/>
Microelectronic Processing / 
W.C.W. Ruska. 
 - New York :  McGraw-Hill Book Company,  1987. 
 - 430 p. :  fig., tables. 
 - McGraw-Hill Series in Electrical Engineering. Computer Engineering. .
<br/><br/>Includes Bibliographical References and Index. 
<br/><br/><label>ISBN: </label>0-07-054280-5 0-07-054281-3 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics