Handbook of thin-film deposition processes and techniques :  principles, methods, equipment, and applications / 
edited by Klaus K. Schuegraf. 
 - Park Ridge, N.J., U.S.A. :  Noyes Publications,  1988. 
 - xvii, 413 p. :  ill. 
<br/><br/>Includes bibliographies and index 
<br/><br/><label>ISBN: </label>0-8155-1153-1 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin film devices--Design and construction