TY  - BOOK
AU  - Coffa,S.
ED  - North Atlantic Treaty Organization
ED  - NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies
TI  - Crucial issues in semiconductor materials and processing technologies
SN  - 0-7923-2003-4
PY  - 1992///
CY  - Dordrecht, Boston, London
PB  - Kluwer Academic Publishers
KW  - Semiconductors
KW  - Congresses
N1  - "Published in cooperation with NATO Scientific Affairs Division."; "Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies, Erice, Italy, 1-13 July 1991."; Includes index
ER  -