Handbook of deposition technologies for films and coatings : Science, technology, and applications /
edited by Rointan F. Bunshah.
- 2nd ed.
- Park Ridge, N.J. : Noyes Publications, 1994.
- xxvi, 861 p. : ill. ; 25 cm.
- Materials science and process technology series. Electronic materials and process technology .
- 667/.9 .
Rev. ed. of: Deposition technologies for films and coatings. c1982.