Defects in high-k gate dielectric stacks : Nano-electronic semiconductor devices / Ed. by Evgeni Gusev. - Dordrecht, The Netherlands : Springer, 2006. - x, 492 p. : ill. - NATO Science Series Series II : Mathematics, Physics and Chemistry Vol. 220 .

"Proceedings of the NATO Advanced Research Workshop on Defects in High-k Dielectric Nano-electronic Semiconductor Devices, held July 11-14, 2005, in St. Petersburg, Russia." - Colophon.

Includes bibliogr. references and indexes

140204366X (PB) 1402043651 (HB) 1402043678 (e-book)


Gate array circuits--Congresses
Dielectrics--Congresses
Semiconductors--Defects--Congresses