TY  - BOOK
AU  - Yurish,Sergey Y.
AU  - Gomes,Maria Teresa S.R.
ED  - NATO Advanced Study Insitute on Smart Sensors and MEMS
ED  - North Atlantic Treaty Organization
TI  - Smart sensors and MEMS
SN  - 1402029276 (HB)
PY  - 2004///
CY  - Dordrecht
PB  - Kluwer Acad. Publ.
KW  - Microelectromechanical systems
KW  - Congresses
KW  - Microtechnology
KW  - Smart sensors
N1  - Includes bibliogr. references and index
ER  -