Smart sensors and MEMS / 
Ed. by Sergey Y. Yurish, Maria Teresa S.R. Gomes. 
 - Dordrecht :  Kluwer Acad. Publ.,  2004. 
 - xv, 480 p. :  ill., photos. 
 - NATO Science Series  II:  Mathematics, Physics and Chemistry  Vol. 181 .
<br/><br/>Includes bibliogr. references and index 
<br/><br/><label>ISBN: </label>1402029276 (HB) 1402029292 (e-book) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Congresses<br/>Microtechnology--Congresses
<br/><br/><label>Subjects--Index Terms: </label>Smart sensors