TY  - BOOK
AU  - Nalwa,Hari Singh
TI  - Handbook of thin film materials
SN  - 0125129084 (set : acid-free paper)
U1  - 621.3815/2 21
PY  - 2002///
CY  - San Diego
PB  - Academic Press
KW  - Thin films
KW  - Handbooks, manuals, etc
N1  - Includes bibliographical references and indexes; v. 1. Deposition and processing of thin films -- v. 2. Characterization and spectroscopy of thin films -- v. 3. Ferroelectric and dielectric thin films -- v. 4. Semiconductor and superconductor thin films -- v. 5. Nanomaterials and magnetic thin films
ER  -