Handbook of thin film materials / 
edited by Hari Singh Nalwa. 
 - San Diego :  Academic Press,  c2002. 
 - 5 v. :  ill. ;  29 cm. 
 - 621.3815/2 .
<br/><br/>Includes bibliographical references and indexes. 
<br/><br/>v. 1. Deposition and processing of thin films -- v. 2. Characterization and spectroscopy of thin films -- v. 3. Ferroelectric and dielectric thin films -- v. 4. Semiconductor and superconductor thin films -- v. 5. Nanomaterials and magnetic thin films. 
<br/><br/><label>ISBN: </label>0125129084 (set : acid-free paper) 0125129092 (v. 1 : acid-free paper) 0125129106 (v. 2 : acid-free paper) 0125129114 (v. 3 : acid-free paper) 0125129122 (v. 4 : acid-free paper) 0125129130 (v. 5 : acid-free paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin films--Handbooks, manuals, etc.
<br/><br/><label>Dewey Class. No.: </label>621.3815/2