TY  - BOOK
AU  - Runyan,W.R.
AU  - Shaffner,T.J.
TI  - Semiconductor measurements and instrumentation
SN  - 0070576971
PY  - 1998///
CY  - New York, N.Y.
PB  - McGraw Hill
KW  - Semiconductors
KW  - Physical measurements
N1  - Includes bibliographical references and index; Crystal orientation--Crystal defects--Impurity concentration--Resistivity, sheet resistance, and contact resistance
UR  - http://www.loc.gov/catdir/bios/mh041/97026081.html
UR  - http://www.loc.gov/catdir/description/mh023/97026081.html
UR  - http://www.loc.gov/catdir/toc/mh022/97026081.html
UR  - http://www.ee.mcgraw-hill.com
ER  -