Semiconductor measurements and instrumentation /
by W.R. Runyan and T.J. Shaffner.
- 2nd ed.
- New York, N.Y. : McGraw Hill, 1998.
- x, 454 p. : ill. ; 24 cm.
Includes bibliographical references and index.
Crystal orientation--Crystal defects--Impurity concentration--Resistivity, sheet resistance, and contact resistance.