Runyan, W.R.

Semiconductor measurements and instrumentation / by W.R. Runyan and T.J. Shaffner. - 2nd ed. - New York, N.Y. : McGraw Hill, 1998. - x, 454 p. : ill. ; 24 cm.

Includes bibliographical references and index.

Crystal orientation--Crystal defects--Impurity concentration--Resistivity, sheet resistance, and contact resistance.

0070576971


Semiconductors.
Physical measurements.