TY  - BOOK
AU  - Hayzelden,Clive
AU  - Hetherington,Crispin
AU  - Ross,Frances
ED  - Symposium held April 15-16, 1998, San Francisco, California, U.S.A.
TI  - Electron microscopy of semiconducting materials and ULSI devices
SN  - 1-55899-429-7
SN  - 0272-9172
PY  - 1998///
CY  - Warrendale, Pennsylvania
PB  - Materials Research Society
KW  - Electron microscopy
KW  - Congresses
KW  - Integrated circuits
KW  - Semiconductors
N1  - Includes bibliographical references and indexes
ER  -