Electron microscopy of semiconducting materials and ULSI devices / 
Ed. by Clive Hayzelden et al. 
 - Warrendale, Pennsylvania :  Materials Research Society,  1998. 
 - XI, 270 p. 
 - Materials research society symposium proceedings  Vol. 523 .
<br/><br/>Includes bibliographical references and indexes. 
<br/><br/><label>ISBN: </label>1-55899-429-7 
<br/><br/><label>ISSN: </label>0272-9172 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electron microscopy--Congresses<br/>Integrated circuits<br/>Semiconductors--Congresses