TY - BOOK AU - Oks,Efim ED - North Atlantic Treaty Organization ED - NATO Advanced Research Workshop on Emerging Applications of Vacuum-Arc-Produced Plasma, Ion and Electron Beams TI - Emerging applications of vacuum-arc-produced plasma, ion and electron beams SN - 1-4020-1065-6 PY - 2002/// CY - Dordrecht, Boston, London PB - Kluwer Acad. Publ. KW - Electronics KW - Ion and Electron Beams N1 - Includes bibliogr. references ER -