Процессы плазменного травления в микро- и нанотехнологиях / : (Գրառման հմ. 719344)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01151nam a2200253 a 4500 |
| 001 - CONTROL NUMBER | |
| control field | 000813899 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20170507214926.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 110620s2010 ||| r 000 0 rus d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 978-5-9963-0032-7 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | |
| 041 0# - LANGUAGE CODE | |
| Language code of text/sound track or separate title | rus |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Галперин, Вячеслав Александрович |
| 245 10 - TITLE STATEMENT | |
| Title | Процессы плазменного травления в микро- и нанотехнологиях / : |
| Remainder of title | Учебное пособие / |
| Statement of responsibility, etc. | В. А. Галперин, Е. В. Данилкин, А. И. Мочалов ; под ред. С. П. Тимошенкова. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Москва : |
| Name of publisher, distributor, etc. | Бином. Лаб. знаний, |
| Date of publication, distribution, etc. | 2010. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 283 с. : |
| Other physical details | ил., табл. |
| 440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE | |
| Title | Нанотехнологии |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Библиогр.: с. 275-280 |
| 650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Радиоэлектроника |
| 653 0# - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Микроэлектроника |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Нанотехнологии |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Данилкин, Евгений Владимирович |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Мочалов, Алексей Иванович |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Тимошенко, С.П. |
| Relator term | ред. |
| Relator code | edt |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Date acquired | Shelving control number | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type | Public note |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| General | Fundamental Scientific Library | Fundamental Scientific Library | 07/05/2017 | 127 | PII/655705 | FL0187230 | 07/05/2017 | 07/05/2017 | Book | 30 Days Loan |