Նորմալ դիտում MARC դիտում ISBD Դիտում

Introduction to Microlithography : Theory, Materials, and Processing / Edt. by L.F. Thompson, C.G. Willson & M.J. Bowden. - Washington : American Chemical Society, 1983. - vol. : fig., tables. - ACS Symposium Series .

Includes Bibliography and Index.

vol. 219 ( 1983, 363 p.)

ISBN: 0-8412-0775-5

Subjects--Topical Terms:
Microlithography