Microelectronic Processing /
Ruska, Walter E.W.
Microelectronic Processing / W.C.W. Ruska. - New York : McGraw-Hill Book Company, 1987. - 430 p. : fig., tables. - McGraw-Hill Series in Electrical Engineering. Computer Engineering. .
Includes Bibliographical References and Index.
0-07-054280-5 0-07-054281-3
Microelectronics
Microelectronic Processing / W.C.W. Ruska. - New York : McGraw-Hill Book Company, 1987. - 430 p. : fig., tables. - McGraw-Hill Series in Electrical Engineering. Computer Engineering. .
Includes Bibliographical References and Index.
0-07-054280-5 0-07-054281-3
Microelectronics