Handbook of thin-film deposition processes and techniques :
Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications /
edited by Klaus K. Schuegraf.
- Park Ridge, N.J., U.S.A. : Noyes Publications, 1988.
- xvii, 413 p. : ill.
Includes bibliographies and index
0-8155-1153-1
Thin film devices--Design and construction
Includes bibliographies and index
0-8155-1153-1
Thin film devices--Design and construction