Smart sensors and MEMS /
Smart sensors and MEMS /
Ed. by Sergey Y. Yurish, Maria Teresa S.R. Gomes.
- Dordrecht : Kluwer Acad. Publ., 2004.
- xv, 480 p. : ill., photos.
- NATO Science Series II: Mathematics, Physics and Chemistry Vol. 181 .
Includes bibliogr. references and index
1402029276 (HB) 1402029292 (e-book)
Microelectromechanical systems--Congresses
Microtechnology--Congresses
Smart sensors
Includes bibliogr. references and index
1402029276 (HB) 1402029292 (e-book)
Microelectromechanical systems--Congresses
Microtechnology--Congresses
Smart sensors