Tungsten and other refractory metals for VLSI applications III :
Tungsten and other refractory metals for VLSI applications III : proceedings of the 1987 Workshop held October 7-9, 1987 /
edited by Victor A. Wells.
- Pittsburgh, Penn. : Materials Research Society, 1988.
- xiii, 428 p. : ill.
Includes index.
0931837847
Heat resistant alloys.
Tungsten.
Includes index.
0931837847
Heat resistant alloys.
Tungsten.