Electron microscopy of semiconducting materials and ULSI devices /
Electron microscopy of semiconducting materials and ULSI devices /
Ed. by Clive Hayzelden et al.
- Warrendale, Pennsylvania : Materials Research Society, 1998.
- XI, 270 p.
- Materials research society symposium proceedings Vol. 523 .
Includes bibliographical references and indexes.
1-55899-429-7
0272-9172
Electron microscopy--Congresses
Integrated circuits
Semiconductors--Congresses
Includes bibliographical references and indexes.
1-55899-429-7
0272-9172
Electron microscopy--Congresses
Integrated circuits
Semiconductors--Congresses